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[For Semiconductors] PIHera High-Precision Z-Axis Stage with 0.1 nm Resolution

Provides sub-nanometer resolution. 0.1nm resolution and high linearity vertical positioning.

In the semiconductor industry, high-precision positioning is required. Especially in wafer inspection and measurement of fine structures, sub-nanometer level stability and high-speed control are essential. Positioning errors can compromise the reliability of measurement results and potentially lead to reduced yields. This product achieves high-precision positioning in semiconductor measurements with a resolution of 0.1 nm and linearity of 0.02%. 【Application Scenes】 - Wafer inspection - Measurement of fine structures - Interferometers - Confocal microscopes 【Benefits of Implementation】 - Significant improvement in measurement accuracy - Yield enhancement - High-speed and high-precision positioning - Sub-nanometer level stability You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

  • Actuator
  • Piezoelectric Devices
  • encoder
  • High-precision axis stage

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